- All sections
- C - Chemistry; metallurgy
- C23C - Coating metallic material; coating material with metallic material; surface treatment of metallic material by diffusion into the surface, by chemical conversion or substitution; coating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general
- C23C 16/511 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (CVD) processes characterised by the method of coating using electric discharges using microwave discharges
Patent holdings for IPC class C23C 16/511
Total number of patents in this class: 562
10-year publication summary
|
62
|
36
|
47
|
50
|
39
|
36
|
39
|
40
|
45
|
7
|
| 2015 | 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| Tokyo Electron Limited | 11599 |
198 |
| Applied Materials, Inc. | 16587 |
29 |
| Tohoku University | 2526 |
13 |
| Element Six Technologies Limited | 179 |
12 |
| National University Corporation Nagoya University | 921 |
12 |
| National Institute of Advanced Industrial Science and Technology | 3677 |
10 |
| Board of Trustees of Michigan State University | 1141 |
10 |
| KHS Corpoplast GmbH | 167 |
8 |
| Sidel Participations | 984 |
8 |
| Shimadzu Corporation | 5791 |
7 |
| Draka Comteq, B.V. | 275 |
7 |
| KHS GmbH | 1381 |
7 |
| Brother Kogyo Kabushikikaisha | 1709 |
7 |
| Element Six Limited | 86 |
6 |
| Samsung Electronics Co., Ltd. | 131630 |
5 |
| Recarbon, Inc. | 30 |
5 |
| SCHOTT AG | 1675 |
5 |
| 6K Inc | 132 |
5 |
| Shanghai Zhengshi Technology Co., Ltd | 11 |
5 |
| International Business Machines Corporation | 60644 |
4 |
| Other owners | 199 |